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>Á¦Ç°¼Ò°³>Power Supply>RF Generator |
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Impedance Matching Networks |
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World Leader in Custom Designs |
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Advantages of working with Comet: |
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RF Àü¹® ±â¾÷
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RF system »ê¾÷À» À̲ô´Â ½Ç¸®Äܺ§¸®ÀÇ R&D¼¾ÅÍ¿Í, °¢ ³ª¶ó¿¡ ÇöÁöÈµÈ ¿£Áö´Ï¾î¸µ, Á¦Á¶ ¹× ±â¼úÁö¿ø°ú ÇÔ²² Plasma Control Technologies(PCT)´Â ¹ÝµµÃ¼ ¹× ¹Ú¸· »ê¾÷¿¡ ÃÖ°í±ÞÀÇ impedance matching network ±â¼úÀ» Á¦°øÇÕ´Ï´Ù.
COMET PCT´Â 'AGS'¶ó´Â impedance matching networkÀÇ Ç¥ÁØ Á¦Ç°À» Á¦°øÇÕ´Ï´Ù. AGSÁ¦Ç°Àº ¸ðµç ÃÖ°íÀÇ ±â¼úÀÌ Àû¿ëµÇ¾î ÀÖ½À´Ï´Ù.
¡á RF power match´Â À¯¿¬ÇÑ tune ¿µ¿ª, ºü¸¥ tune ½Ã°£°ú, ´Ù¾çÇÑ ºÐ¾ß¿¡ Àû¿ëµÉ ¼ö ÀÖµµ·Ï ¼³°è µÇ¾ú½À´Ï´Ù.
¡á »õ·Î¿î µðÁöÅÐ ÄÁÆ®·Ñ ½Ã½ºÅÛ¿¡´Â RF pulse ±â´É°ú, 360¡Æ°¡ 3200 ½ºÅÜÀ¸·Î ±¸¼ºµÈ ¸Å¿ì Á¤¹ÐÇÑ ½ºÅܸðÅÍ°¡ Á¦°ø µË´Ï´Ù.
¡á ¸ðµç AGS ¸ðµ¨Àº 10kHz±îÁöÀÇ pulse ÁÖÆļö¸¦ Àü´Þ ÇÒ ¼ö ÀÖ°í, ÃÖÀûÀÇ match positionÀ» ÃßÀûÇÏ´Â ±â´ÉÀ» Á¦°ø ÇÕ´Ï´Ù. |
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AGS Products |
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Model |
Frequency |
Power, max output |
Output Connector |
AGS 1310A |
13.56 MHz |
1000w |
7/16 DIN, 10mm Multicontact Botoom |
AGS 1310A |
13.56 MHz |
1000w |
mounting bar, Dual Mounting bar Bottom |
AGS 1310A |
13.56 MHz |
1000w |
Mouting bar Bottom, 10mm Multicontact |
AGS 1330A |
13.56 MHz |
3000w |
Mounting bar, 10mm Multicontact |
AGS 1350W |
13.56 MHz |
5000w |
Mouting bar |
AGS 2710A |
27.12 MHz |
1000w |
10mm Multicontact, Mouting bar |
AGS 2710A |
40.68 MHz |
1000w |
7/16 DIN, 10mm Multicontact |
AGS 4010A |
40.68 MHz |
1000w |
Mounting bar |
AGS 4020A |
40.68 MHz |
2000w |
10mm Multicontact, Mouting bar |
AGS 4040W |
40.68 MHz |
4000w |
Mounting bar |
AGS 6020A |
60.00 MHz |
2000w |
10mm Multicontact, Mouting bar |
AGS 6020A |
60.00 MHz |
2000w |
10mm Multicontact Bottom |
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