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>Á¦Ç°¼Ò°³>Plasma Source>À̿¼ҽº |
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| JYT Ion Source provides high power plasma beams for surface treatment processes. |
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| ³»ÀåÇü |
¿ÜÀåÇü |
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¸ðÀçÀ§¿¡ ÀÜ¿©¹° Á¦°Å |
¸ðÀç Pre-cleaning |
Ç¥¸éó¸® |
Á¢Âø·Â Çâ»ó |
Plasma etching |
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JPG30 |
JPG50 |
JPG70 |
JPG100 |
JPG120 |
JPG150 |
JPG170 |
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| Àüü±æÀÌ(§®) |
300 |
500 |
700 |
1000 |
1200 |
1500 |
1700 |
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| À¯È¿±æÀÌ(§®) |
180 |
380 |
580 |
880 |
1080 |
1380 |
1580 |
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| ¹æÀü Àü¾Ð ¹üÀ§ |
500 to 3000V |
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| ÃÖ´ë ¹æÀü Àü·ù°ª |
2000§Ì |
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| ÃÖ´ë ¹æÀü Àü·Â°ª |
DC / 3000W |
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| ±âŸ |
- Single array magnet
- Collimate type
- No grid type |
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| ó¸®Àü |
ó¸®ÈÄ |
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ó¸®ÈÄ |
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